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International Letters of Chemistry, Physics and Astronomy
Volume 58

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Sensing Properties of WO3 as Thin Film Prepared by PVD towards Ethanol Vapor

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Abstract:

Three thin films were prepared by PVD starting from WO3 powder with thicknesses ( 998.7, 1620, 2240 nm ) respectively on glass substrates under limited thermal and pressure conditions, studied their I-V characteristics and calculated the sensitivity for 100 ppm of ethanol vapor adsorption (The temperature of the films have been changed from 25°C to 350°C). A comparison among them was achieved at 300 °C as an operating degree and found that the 1620 nm WO3 has more sensitivity and has more power to adsorb for ethanol vapor on it.

Info:

Periodical:
International Letters of Chemistry, Physics and Astronomy (Volume 58)
Pages:
77-82
DOI:
10.18052/www.scipress.com/ILCPA.58.77
Citation:
M. Ali et al., "Sensing Properties of WO3 as Thin Film Prepared by PVD towards Ethanol Vapor", International Letters of Chemistry, Physics and Astronomy, Vol. 58, pp. 77-82, 2015
Online since:
Sep 2015
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