Synthesis of Carbon Nanotubes by CVD over Fe Catalyst Prepared in Spin Coating on SiO₂/p-Si(100)

Carbon nanotubes (CNTs) have been grown by the decomposition of C₂H₂ over thin catalyst film in order to investigate the growth mechanism of CNTs by chemical vapor deposition (CVD).The catalyst was prepared from an iron chloride FeCl₃ precursor solution that was spin –coated on SiO₂ substrate. The growth mechanism and the length and the diameter of the CNTs were greatly influenced by the precursor concentration, the time deposition and the temperature and the ratio of C₂H₂:N₂ are fixed. Transmittance electron microscopy and Scanning electron microscopy and Raman spectroscopy and X-ray diffraction have been carried out in order to investigate the behavior of the growth process. The iron chloride film contact with the C₂H₂:N₂ reaction atmosphere.