Silicon Carbide and Related Materials - 1999
Materials Science Forum Volumes 338 - 342
doi:10.4028/0-87849-854-0
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p253
The APD Annihilation Mechanism of 3C-SiC Hetero-Epilayer on Si(001) Substrate
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286 K
]
Authors: Yuuki Ishida, Tetsuo Takahashi, Hajime Okumura, Toshihiro Sekigawa, Sadafumi Yoshida
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p257
Improvement of 3C-SiC Surface Morphology on Si(100) by Adding HCl using Atmospheric CVD
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227 K
]
Authors: Yi Chen, Yasuichi Masuda, Chacko Jacob, T. Shirafuji, Shigehiro Nishino
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p261
Carbonization on (100) Silicon for Heteroepitaxial Growth of 3C-SiC
[
272 K
]
Authors: Hideki Shimizu, Takaomi Ohba
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p265
Growth of 3C-SiC/Si Multilayer Heterostructures by Supersonic Free Jets
[
260 K
]
Authors: Yoshifumi Ikoma, Takeshi Endo, T. Tada, Fumio Watanabe, Teruaki Motooka
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p269
Formation of High Quality SiC on Si(100) at 900°C using Monomethylsilane Gas-Source MBE
[
570 K
]
Authors: Hideki Nakazawa, M. Suemitsu, S. Asami
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p273
Growth and Characterization of N-Doped SiC Films from Trimethylsilane
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201 K
]
Authors: Jin Ming Chen, A.J. Steckl, Mark J. Loboda
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p277
The Effect of Ge on the Structure & Morphology of SiC Films Grown on (111) Si Substrates
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301 K
]
Authors: W.L. Sarney, L. Salamanca-Riba, P. Zhou, Crawford Taylor, Michael G. Spencer, R.D. Vispute, Kenneth A. Jones
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p281
In Situ Monitoring of the Effect of Ge on the SiC Growth on (111)Si Surfaces
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280 K
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Authors: T. Wöhner, Thomas Stauden, J.A. Schaefer, Jörg Pezoldt
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p285
Structural Investigations of the Nucleation and Growth of SiC during Rapid Thermal Conversion of (111)Si
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290 K
]
Authors: Volker Cimalla, W. Attenberger, J.K.N. Lindner, B. Stritzker, Jörg Pezoldt
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p289
The Influence of Foreign Atoms on the early Stages of SiC Growth on (111)Si
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239 K
]
Authors: Jörg Pezoldt, György Vida, M. Rouhani Laridjani, M. Averous, T. Wöhner, J.A. Schaefer, Thomas Stauden, Gernot Ecke, R. Pieterwas, Lothar Spieß